Today, MEMS have wide applications in modern technologies. Magneto hydro dynamic (MHD) micropumps play an important role in the MEMS industry and have been thoroughly studied in the recent years. In this study, the idea of classic reciprocating micropumps was combined with magneto hydro dynamics (MHD) to develop a novel Magneto Mercury Reciprocating (MMR) micropump. To attain this goal, the Lorentz force, as the actuation mechanism, was used to move a conductive liquid (mercury) slug in a reciprocating manner in order to suck the working fluid (air) from the inlet and pump it to the outlet. The performance of the fabricated MMR micropump was examined in terms of parameters such as pressure difference, pumping frequency, and magnetic flux density. The maximum flow rate was achieved at a minimum backpressure of 9.5 mL/min. The maximum pressure head achieved in the experiments was 245 Pa. Furthermore, the results of these experiments were compared with other micropumps, which showed an improvement of 153% over the next best MHD micropump presented to date.
کلید واژگان :Micropump, Lorentz force, Reciprocating
ارزش ریالی : 600000 ریال
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